Deterministic doping to silicon and diamond materials for quantum processing

Erstveröffentlichung
2016
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Authors
Shinada, Takahiro
Prati, Enrico
Tanii, Takashi
Teraji, Tokuyuki
Onoda, Shinobu
et al.
Faculties
Fakultät für Naturwissenschaften
Institutions
Institut für Quantenoptik
Published in
2016 IEEE 16th International Conference on Nanotechnology (IEEE-Nano). - New York, NY : IEEE, 2016. - S. 888-890. - ISBN 978-1-5090-1493-4
Conference
16th IEEE International Conference on Nanotechnology (IEEE-NANO), IEEE Nanotechnol Council, 2016-08-22 - 2016-08-25, Sendai, Japan
Keywords
single-ion implantation
Dewey Decimal Group
DDC 540 / Chemistry & allied sciences
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