Deterministic doping to silicon and diamond materials for quantum processing

Erstveröffentlichung
2016Authors
Shinada, Takahiro
Prati, Enrico
Tanii, Takashi
Teraji, Tokuyuki
Onoda, Shinobu
Beitrag zu einer Konferenz
Published in
2016 IEEE 16th International Conference on Nanotechnology (IEEE-Nano). - New York, NY : IEEE, 2016. - S. 888-890. - ISBN 978-1-5090-1493-4
Faculties
Fakultät für NaturwissenschaftenInstitutions
Institut für QuantenoptikConference
16th IEEE International Conference on Nanotechnology (IEEE-NANO), IEEE Nanotechnol Council, 2016-08-22 - 2016-08-25, Sendai, Japan
Subject headings
[Free subject headings]: single-ion implantation[DDC subject group]: DDC 540 / Chemistry & allied sciences