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Dry etching of GaN substrates for high-quality homoepitaxy

Erstveröffentlichung
1999
Authors
Schauler, M
Eberhard, F
Kirchner, C
Schwegler, V
Pelzmann, A
et al.
Wissenschaftlicher Artikel


Published in
Applied Physics Letters ; 74 (1999), 8. - S. 1123-1125. - ISSN 0003-6951
Link to publication
https://dx.doi.org/10.1063/1.123463
Faculties
Fakultät für Ingenieurwissenschaften, Informatik und Psychologie
Institutions
Institut für Optoelektronik
Subject headings
[DDC subject group]: DDC 620 / Engineering & allied operations

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