Thermomechanical investigations of thin polymer films with scanning force microscopy
FakultätenFakultät für Naturwissenschaften
LizenzStandard (Fassung vom 03.05.2003)
In the present study a variety of experiments concerning the nanoscale thermomechanical properties of several materials were presented. The interplay of thermal and mechanical material properties was investigated on the nanoscale by conducting Scanning Force Microscopic (SFM) measurements on heated samples and using heatable SFM cantilever tips at elevated sample temperatures and under vacuum conditions. These heatable SFM cantilever tips are manufactured at the IBM Research Laboratory in Zurich (Switzerland) and are used for investigations of a novel data storage concept called "Millipede", which uses these heatable tips to create tiny indentations in thin polymer films to store data with ultra-high density. As the present study was conducted in cooperation between the IBM Laboratory in Zurich and the Department of Experimental Physics at the University of Ulm (Germany), these not commercially available cantilever tips could be used for the experiments described in this work. On the one hand, investigations concerning possible data storage media for the "Millipede" were performend and hence, research closely linked to a possible product was conducted. On the other hand, basic physical research in the field of Scanning Thermal microscopy (SThM) was carried out. Mainly thin polymer films (Polymethylmethacrylate and SU8 epoxy photo resists) with a thickness of less than 100 nm were investigated, but also silicon substrates as well as a 3 nm thin hafnium oxide layer on silicon were analyzed.
Erstellung / Fertigstellung
Normierte SchlagwörterNanotechnology [LCSH]
Scanning force microscopy [LCSH]
Thin films. Thermomechanical properties [LCSH]