Optimization of nucleation and buffer layer growth for improved GaN quality

Erstveröffentlichung
2007Authors
Hertkorn, Joaquim
Brückner, Peter
Thapa, Sarad B..
Wunderer, Thomas
Scholz, Felix
Wissenschaftlicher Artikel
Published in
Journal of Crystal Growth ; 308 (2007), 1. - S. 30-36. - ISSN 0022-0248. - eISSN 1873-5002
Link to publication
https://dx.doi.org/10.1016/j.jcrysgro.2007.07.056Faculties
Fakultät für Ingenieurwissenschaften, Informatik und PsychologieInstitutions
Institut für OptoelektronikInstitut für Halbleiterphysik
Subject headings
[Free subject headings]: atomic force microscopy | high resolution x-ray diffraction | nucleation | metalorganic vapor phase epitaxy | nitrides | high electron mobility transistors | EPITAXIAL LATERAL OVERGROWTH | ALGAN/GAN HETEROSTRUCTURES | THREADING DISLOCATIONS | SAPPHIRE SUBSTRATE | ELECTRON-GAS | X-RAY | MOBILITY | SURFACE | GAN/ALGAN | DENSITY[DDC subject group]: DDC 500 / Natural sciences & mathematics | DDC 530 / Physics | DDC 620 / Engineering & allied operations