Optimization of residual stresses inside diamond thin films grown by hot filament chemical vapor deposition (HFCVD)

Erstveröffentlichung

2023

Authors

Haddad, Mike

Kurtulus, Onur

Mertens, Michael

Brühne, Kai

Glüche, Peter

et al.

Wissenschaftlicher Artikel

Published in

Diamond and Related Materials ; 131 (2023). - Art.-Nr. 109564. - ISSN 0925-9635. - eISSN 1879-0062

Link to publication

https://dx.doi.org/10.1016/j.diamond.2022.109564

Faculties

Fakultät für Ingenieurwissenschaften, Informatik und Psychologie

Institutions

Institut für Funktionelle Nanosysteme

Subject headings

[Free subject headings]: Hot filament chemical vapor deposition | Residual stresses | Diamond thin films | Microand nano -crystalline diamond | Substrate deflection technique | X-RAY-DIFFRACTION | INTRINSIC STRESS | INTERNAL-STRESS | CVD DIAMOND | SILVER | DEFORMATION
[DDC subject group]: DDC 530 / Physics | DDC 620 / Engineering & allied operations

Metadata

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