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High resolution vacuum scanning thermal microscopy of HfO2 and SiO2

Erstveröffentlichung
2008
Authors
Hinz, Michael
Marti, Othmar
Gotsmann, Bernd
Lantz, Mark A.
Dürig, Urs
Wissenschaftlicher Artikel


Published in
Applied Physics Letters ; 92 (2008), 4. - Art.-Nr. 043122. - ISSN 0003-6951. - eISSN 1077-3118
Link to publication
https://dx.doi.org/10.1063/1.2840186
Faculties
Fakultät für Naturwissenschaften
Institutions
Institut für Experimentelle Physik
Subject headings
[Free subject headings]: CONDUCTIVITY
[DDC subject group]: DDC 530 / Physics

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