Piezo-actuated nanodiamond cantilever technology for high-speed applications

Erstveröffentlichung
2008
Authors
Kusterer, Joachim
Lüker, Arne
Herfurth, Patrick
Men, Yakiv
Ebert, Wolfgang
et al.
Beitrag zu einer Konferenz


Published in
Diamond and Related Materials ; 17 (2008), 7-10, SI. - S. 1429-1433. - ISSN 0925-9635
Link to publication
https://dx.doi.org/10.1016/j.diamond.2008.01.119
Faculties
Fakultät für Ingenieurwissenschaften, Informatik und Psychologie
Institutions
Institut für Elektronische Bauelemente und Schaltungen
Conference
18th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide, 2007-09-09 - 2007-09-14, Berlin
Subject headings
[Free subject headings]: nanodiamond | piezoelectrics | PZT | MEMS | THIN-FILMS | CVD
[DDC subject group]: DDC 530 / Physics | DDC 620 / Engineering & allied operations
Metadata
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