Characteristics of boron delta-doped diamond for electronic applications
Erstveröffentlichung
2008
Beitrag zu einer Konferenz
Published in
Diamond and Related Materials ; 17 (2008), 4-5, SI. - S. 409-414. - ISSN 0925-9635. - eISSN 1879-0062
Link to publication
https://dx.doi.org/10.1016/j.diamond.2007.12.030Faculties
Fakultät für Ingenieurwissenschaften, Informatik und PsychologieInstitutions
Institut für Elektronische Bauelemente und SchaltungenConference
International Conference on New Diamond and Nano Carbons, 2007-05-28 - 2007-05-31, Osaka
Subject headings
[Free subject headings]: delta-doping | CVD growth | elastic recoil detection | electrochemical impedance | DEPOSITED DIAMOND | CHANNEL | DEVICES | FILMS[DDC subject group]: DDC 530 / Physics | DDC 620 / Engineering & allied operations