Highly dense amorphous Nb2O5 films with closed nanosized pores

Erstveröffentlichung

2009

Authors

Vinnichenko, Mykola

Rogozin, A.

Grambole, Dieter

Munnik, Frans

Kolitsch, Andreas

et al.

Wissenschaftlicher Artikel

Published in

Applied Physics Letters ; 95 (2009), 8. - Art.-Nr. 081904. - ISSN 0003-6951. - eISSN 1077-3118

Link to publication

https://dx.doi.org/10.1063/1.3212731

Institutions

ZE Elektronenmikroskopie

Subject headings

[Free subject headings]: amorphous state | extinction coefficients | nanoporous materials | niobium compounds | porosity | refractive index | sputter deposition | stress effects | thin films | SPECTROSCOPIC ELLIPSOMETRY | OPTICAL-PROPERTIES | OXIDE-FILMS | THIN-FILMS | DEPOSITION PARAMETERS | STRESS
[DDC subject group]: DDC 530 / Physics

Metadata

Show full item record