Non-Close-Packed Crystals from Self-Assembled Polystyrene Spheres by Isotropic Plasma Etching: Adding Flexibility to Colloid Lithography

Erstveröffentlichung
2009Authors
Plettl, Alfred
Enderle, Fabian
Saitner, Marc
Manzke, Achim
Pfahler, Christian
Wissenschaftlicher Artikel
Published in
Advanced Functional Materials ; 19 (2009), 20. - S. 3279-3284. - ISSN 1616-301X. - eISSN 1616-3028
Link to publication
https://dx.doi.org/10.1002/adfm.200900907Faculties
Fakultät für NaturwissenschaftenInstitutions
Institut für FestkörperphysikSubject headings
[Free subject headings]: NANOSPHERE LITHOGRAPHY | NANOWIRE ARRAYS | FABRICATION | NANOSTRUCTURES | SILICON | DENSITY | SIZE | NANOPARTICLE | TEMPLATES | SURFACES[DDC subject group]: DDC 530 / Physics | DDC 540 / Chemistry & allied sciences | DDC 620 / Engineering & allied operations