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AuthorMunding, Andreasdc.contributor.author
Date of accession2016-03-14T13:38:45Zdc.date.accessioned
Available in OPARU since2016-03-14T13:38:45Zdc.date.available
Year of creation2002dc.date.created
AbstractIn this thesis a process for the realization of microfluidic and micromechanic functional surface structures on CVD-diamond is developed. The concept is based on a CVD silicon oxide sacrificial layer, limited to a maximum thickness of ca. 5 µm due to thermal stress, which builds up during the diamond growth process. After the sacrificial structures have been overgrown, they are removed in an HF based wet etch step. To demonstrate the working principle, electromechanical (bimetallic actuator, membrane) and fluidic (channels, passive valves) functional elements are combined to form a membrane micropump with membrane features of 500 x 500 µm2 at a membrane thickness of approx. 2 µm. Fluidic and thermomechanic simulations where used to find the optimal geometric parameters for diffusor/nozzle efficiency and membrane deflection. Due to limitations of the structures height (oxide sacrificial layer), the throughput of the system is beyond practical measures. Therefore, first experiments on the introduction of alternative metal based sacrifical structures (plated copper) without mayor limitations in height are undertaken. Also, as an alternative to monolithic fabrication, a two component hybrid process with a fluid plate and a membrane plate is introduced.dc.description.abstract
Languagededc.language.iso
PublisherUniversität Ulmdc.publisher
LicenseStandard (Fassung vom 03.05.2003)dc.rights
Link to license texthttps://oparu.uni-ulm.de/xmlui/license_v1dc.rights.uri
KeywordBimetallic actuatordc.subject
KeywordDiffusor/Nozzledc.subject
KeywordMembrane pumpdc.subject
KeywordMicropumpdc.subject
KeywordPassive valvedc.subject
KeywordSacrificial layerdc.subject
Dewey Decimal GroupDDC 620 / Engineering & allied operationsdc.subject.ddc
LCSHChemical vapor depositiondc.subject.lcsh
LCSHDiamond thin filmsdc.subject.lcsh
LCSHMembranes: Technologydc.subject.lcsh
LCSHMicroelectromechanical systemsdc.subject.lcsh
LCSHMicrofluidicsdc.subject.lcsh
LCSHMicrotechnologydc.subject.lcsh
LCSHPumping machinerydc.subject.lcsh
TitleEntwicklung von Mikro-Membranpumpen auf CVD-Diamantschichtendc.title
Resource typeAbschlussarbeit (Master; Diplom)dc.type
DOIhttp://dx.doi.org/10.18725/OPARU-359dc.identifier.doi
URNhttp://nbn-resolving.de/urn:nbn:de:bsz:289-vts-56110dc.identifier.urn
GNDMEMSdc.subject.gnd
FacultyFakultät für Ingenieurwissenschaftenuulm.affiliationGeneral
Date of activation2006-06-02T11:47:58Zuulm.freischaltungVTS
Peer reviewneinuulm.peerReview
DCMI TypeTextuulm.typeDCMI
VTS-ID5611uulm.vtsID
CategoryPublikationenuulm.category
University Bibliographyjauulm.unibibliographie


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