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AuthorForghani, Kamrandc.contributor.author
AuthorGharavipour, Mohammadrezadc.contributor.author
AuthorKlein, Martindc.contributor.author
AuthorScholz, Ferdinanddc.contributor.author
AuthorKlein, Oliverdc.contributor.author
AuthorKaiser, Utedc.contributor.author
AuthorFeneberg, Martindc.contributor.author
AuthorNeuschl, Benjamindc.contributor.author
AuthorThonke, Klausdc.contributor.author
Date of accession2021-07-22T05:50:59Zdc.date.accessioned
Available in OPARU since2021-07-22T05:50:59Zdc.date.available
Date of first publication2011dc.date.issued
Languageendc.language.iso
PublisherUniversität Ulmdc.publisher
KeywordAlGaNdc.subject
KeywordSiNx nanomaskdc.subject
KeywordMOVPEdc.subject
Keyworddislocation reductiondc.subject
KeywordDISLOCATION DENSITYdc.subject
KeywordGANdc.subject
KeywordOPTIMIZATIONdc.subject
KeywordNUCLEATIONdc.subject
KeywordREDUCTIONdc.subject
KeywordGROWTHdc.subject
KeywordLAYERSdc.subject
Dewey Decimal GroupDDC 530 / Physicsdc.subject.ddc
Dewey Decimal GroupDDC 620 / Engineering & allied operationsdc.subject.ddc
TitleIn-situ deposited SiNx nanomask for crystal quality improvement in AlGaNdc.title
Resource typeBeitrag zu einer Konferenzdc.type
FacultyFakultät für Ingenieurwissenschaften, Informatik und Psychologieuulm.affiliationGeneral
FacultyFakultät für Naturwissenschaftenuulm.affiliationGeneral
InstitutionInstitut für Optoelektronikuulm.affiliationSpecific
InstitutionZE Elektronenmikroskopieuulm.affiliationSpecific
InstitutionInstitut für Quantenmaterieuulm.affiliationSpecific
DCMI TypeTextuulm.typeDCMI
CategoryPublikationsnachweiseuulm.category
DOI (external)10.1002/pssc.201001074dc.identifier.doiExternal
Source - Title of sourcePhysica status solidi C, Current topics in solid state physicssource.title
Source - PublisherWeinheimsource.publisherPlace
Source - Place of publicationWiley-VCH Verlagsource.publisher
Source - Issue7-8source.issue
Source - Year2011source.year
Source - SerialPhysica Status Solidi C-Current Topics in Solid State Physics ; 8source.series
Source - ISSN1862-6351source.identifier.issn
Conference nameInternational Workshop on Nitride Semiconductors (IWN)/Fall Meeting of the European-Materials-Research-Society (E-MRS)/Symposium N/Symposium Huulm.conferenceName
Conference placeTampauulm.conferencePlace
Conference start date2010-09-19uulm.conferenceStartDate
Conference end date2010-09-24uulm.conferenceEndDate
CommunityFakultät für Ingenieurwissenschaften, Informatik und Psychologieuulm.community
CommunityZentrale Einrichtungenuulm.community
CommunityFakultät für Naturwissenschaftenuulm.community
WoS000301581500017uulm.identifier.wos
Bibliographyuulmuulm.bibliographie


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