Topographic patterning by voltage-assisted tribocharging of a polymer

Erstveröffentlichung
2011Authors
Kleiner, Andrea
Marti, Othmar
Duerig, Urs
Knoll, Armin
Gotsmann, Bernd
Wissenschaftlicher Artikel
Published in
Journal of Applied Physics ; 109 (2011), 12. - Art.-Nr. 124312. - ISSN 0021-8979. - eISSN 1089-7550
Link to publication
https://dx.doi.org/10.1063/1.3600211Faculties
Fakultät für NaturwissenschaftenInstitutions
Institut für Experimentelle PhysikSubject headings
[Free subject headings]: ATOMIC-FORCE MICROSCOPY | DATA-STORAGE | NANOWEAR | NANOLITHOGRAPHY | POTENTIOMETRY | LITHOGRAPHY | RELAXATION | FILMS | TIP[DDC subject group]: DDC 530 / Physics