Topographic patterning by voltage-assisted tribocharging of a polymer

Erstveröffentlichung

2011

Authors

Kleiner, Andrea

Marti, Othmar

Duerig, Urs

Knoll, Armin

Gotsmann, Bernd

Wissenschaftlicher Artikel

Published in

Journal of Applied Physics ; 109 (2011), 12. - Art.-Nr. 124312. - ISSN 0021-8979. - eISSN 1089-7550

Link to publication

https://dx.doi.org/10.1063/1.3600211

Faculties

Fakultät für Naturwissenschaften

Institutions

Institut für Experimentelle Physik

Subject headings

[Free subject headings]: ATOMIC-FORCE MICROSCOPY | DATA-STORAGE | NANOWEAR | NANOLITHOGRAPHY | POTENTIOMETRY | LITHOGRAPHY | RELAXATION | FILMS | TIP
[DDC subject group]: DDC 530 / Physics

Metadata

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