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AuthorMiyakawa, Natsukidc.contributor.author
AuthorLegner, Wolfgangdc.contributor.author
AuthorZiemann, Thomasdc.contributor.author
AuthorTelitschkin, Dimitridc.contributor.author
AuthorFecht, Hans-Jörgdc.contributor.author
AuthorFriedberger, Aloisdc.contributor.author
Date of accession2021-03-15T09:39:38Zdc.date.accessioned
Available in OPARU since2021-03-15T09:39:38Zdc.date.available
Date of first publication2012dc.date.issued
Languageendc.language.iso
PublisherUniversität Ulmdc.publisher
KeywordSILICONdc.subject
KeywordHYDRAZINEdc.subject
KeywordSIO2dc.subject
Dewey Decimal GroupDDC 530 / Physicsdc.subject.ddc
Dewey Decimal GroupDDC 620 / Engineering & allied operationsdc.subject.ddc
TitleMEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000°Cdc.title
Resource typeBeitrag zu einer Konferenzdc.type
FacultyFakultät für Ingenieurwissenschaften, Informatik und Psychologieuulm.affiliationGeneral
InstitutionInstitut für Mikro- und Nanomaterialienuulm.affiliationSpecific
DCMI TypeTextuulm.typeDCMI
CategoryPublikationsnachweiseuulm.category
DOI (external)10.1007/s00542-012-1441-0dc.identifier.doiExternal
Source - Title of sourceMicrosystem Technologiessource.title
Source - PublisherNew York, NYsource.publisherPlace
Source - Place of publicationSpringersource.publisher
Source - Volume18source.volume
Source - Issue7-8source.issue
Source - Year2012source.year
Source - From page1077source.fromPage
Source - To page1087source.toPage
Source - ISSN0946-7076source.identifier.issn
Source - eISSN1432-1858source.identifier.eissn
Conference nameConference on Smart Sensors, Actuators, and MEMS Vuulm.conferenceName
Conference placePragueuulm.conferencePlace
Conference start date2011-04-18uulm.conferenceStartDate
Conference end date2011-04-20uulm.conferenceEndDate
CommunityFakultät für Ingenieurwissenschaften, Informatik und Psychologieuulm.community
WoS000305691500028uulm.identifier.wos
Bibliographyuulmuulm.bibliographie


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