MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000°C

Erstveröffentlichung
2012Authors
Miyakawa, Natsuki
Legner, Wolfgang
Ziemann, Thomas
Telitschkin, Dimitri
Fecht, Hans-Jörg
Beitrag zu einer Konferenz
Published in
Microsystem Technologies ; 18 (2012), 7-8. - S. 1077-1087. - ISSN 0946-7076. - eISSN 1432-1858
Link to publication
https://dx.doi.org/10.1007/s00542-012-1441-0Faculties
Fakultät für Ingenieurwissenschaften, Informatik und PsychologieInstitutions
Institut für Mikro- und NanomaterialienConference
Conference on Smart Sensors, Actuators, and MEMS V, 2011-04-18 - 2011-04-20, Prague
Subject headings
[Free subject headings]: SILICON | HYDRAZINE | SIO2[DDC subject group]: DDC 530 / Physics | DDC 620 / Engineering & allied operations