MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000°C
Beitrag zu einer Konferenz
Faculties
Fakultät für Ingenieurwissenschaften, Informatik und PsychologieInstitutions
Institut für Mikro- und NanomaterialienPublished in
Microsystem Technologies ; 18 (2012), 7-8. - S. 1077-1087. - ISSN 0946-7076. - eISSN 1432-1858
Link to publication
https://dx.doi.org/10.1007/s00542-012-1441-0Conference
Conference on Smart Sensors, Actuators, and MEMS V, 2011-04-18 - 2011-04-20, Prague
Keywords
SILICON; HYDRAZINE; SIO2Dewey Decimal Group
DDC 530 / PhysicsDDC 620 / Engineering & allied operations