MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000°C

2012

Miyakawa, Natsuki

Legner, Wolfgang

Ziemann, Thomas

Telitschkin, Dimitri

Fecht, Hans-Jörg

et al.

Beitrag zu einer Konferenz

Microsystem Technologies ; 18 (2012), 7-8. - S. 1077-1087. - ISSN 0946-7076. - eISSN 1432-1858

Fakultät für Ingenieurwissenschaften, Informatik und Psychologie

Institut für Mikro- und Nanomaterialien

Conference on Smart Sensors, Actuators, and MEMS V, 2011-04-18 - 2011-04-20, Prague

[Free subject headings]: SILICON | HYDRAZINE | SIO2
[DDC subject group]: DDC 530 / Physics | DDC 620 / Engineering & allied operations