High-Quality ZnO Layers Grown by CVD on Sapphire Substrates with an AlN Nucleation Layer

Erstveröffentlichung
2020
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Wissenschaftlicher Artikel


Authors
Müller, Raphael
Huber, Florian
Töws, Matthias
Mangold, Martin
Madel, Manfred
et al.
Faculties
Fakultät für Naturwissenschaften
Institutions
Institut für Quantenmaterie
Institut für Funktionelle Nanosysteme
Published in
Crystal Growth and Design ; 20 (2020), 6. - S. 3918-3926. - ISSN 1528-7483. - eISSN 1528-7505
Link to publication
https://dx.doi.org/10.1021/acs.cgd.0c00242
Keywords
CHEMICAL-VAPOR-DEPOSITION; MOLECULAR-BEAM EPITAXY; ZINC-OXIDE; THIN-FILMS; GAN; OPTIMIZATION; DEVICES; METHANE; TCO
Dewey Decimal Group
DDC 500 / Natural sciences & mathematics
DDC 540 / Chemistry & allied sciences
DDC 620 / Engineering & allied operations
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