Termination of diamond surfaces with hydrogen, oxygen and fluorine using a small, simple plasma gun

Erstveröffentlichung

2010

Authors

Salvadori, Maria Cecilia

Araujo, Wagner W. R.

Teixeira, Fernanda S.

Cattani, Mauro

Pasquarelli, Alberto

et al.

Wissenschaftlicher Artikel

Published in

Diamond and related materials ; 19 (2010), 4. - S. 324-328. - ISSN 0925-9635. - eISSN 1879-0062

Link to publication

https://dx.doi.org/10.1016/j.diamond.2010.01.002

Faculties

Fakultät für Ingenieurwissenschaften, Informatik und Psychologie

Institutions

Institut für Elektronische Bauelemente und Schaltungen

Subject headings

[Free subject headings]: Diamond | CVD | Surface terminations | Plasma bombardment | Ion bombardment | CHEMICAL-VAPOR-DEPOSITION | CARBON COMPOSITE FILMS | POLYCRYSTALLINE DIAMOND | FORCE MICROSCOPY | NANOCRYSTALLINE | FUNCTIONALIZATION | ELECTRON | GROWTH | IONS | GAS
[DDC subject group]: DDC 530 / Physics | DDC 620 / Engineering & allied operations

Metadata

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