| Author | Meisch, Tobias | dc.contributor.author |
| Author | Alimoradi-Jazi, Maryam | dc.contributor.author |
| Author | Neuschl, Benjamin | dc.contributor.author |
| Author | Klein, Martin | dc.contributor.author |
| Author | Tischer, Ingo | dc.contributor.author |
| Author | Thonke, Klaus | dc.contributor.author |
| Author | Scholz, Ferdinand | dc.contributor.author |
| Date of accession | 2020-05-04T12:35:51Z | dc.date.accessioned |
| Available in OPARU since | 2020-05-04T12:35:51Z | dc.date.available |
| Date of first publication | 2014 | dc.date.issued |
| Language | en | dc.language.iso |
| Publisher | Universität Ulm | dc.publisher |
| Keyword | (20-21) | dc.subject |
| Keyword | semipolar | dc.subject |
| Keyword | GaN | dc.subject |
| Keyword | PSS | dc.subject |
| Dewey Decimal Group | DDC 530 / Physics | dc.subject.ddc |
| Dewey Decimal Group | DDC 620 / Engineering & allied operations | dc.subject.ddc |
| Title | Crystal quality improvement of semipolar (20-21) GaN on patterned sapphire substrates by in-situ deposited SiN mask | dc.title |
| Resource type | Beitrag zu einer Konferenz | dc.type |
| Faculty | Fakultät für Ingenieurwissenschaften, Informatik und Psychologie | uulm.affiliationGeneral |
| Faculty | Fakultät für Naturwissenschaften | uulm.affiliationGeneral |
| Institution | Institut für Optoelektronik | uulm.affiliationSpecific |
| Institution | Institut für Quantenmaterie | uulm.affiliationSpecific |
| DCMI Type | Text | uulm.typeDCMI |
| Category | Publikationsnachweise | uulm.category |
| DOI (external) | 10.1117/12.2037238 | dc.identifier.doiExternal |
| Source - Title of source | Gallium nitride materials and devices IX | source.title |
| Quellenangabe - Herausgeber | Chyi, Jen-Inn | source.contributor.editor1 |
| Source - Publisher | Bellingham, WA | source.publisherPlace |
| Source - Place of publication | Society of Photo-optical Instrumentation Engineers | source.publisher |
| Source - Year | 2014 | source.year |
| Source - Article number | UNSP 89860A | source.articleNumber |
| Source - Serial | Proceedings of SPIE ; 8986 | source.series |
| Source - ISSN | 0277-786X | source.identifier.issn |
| Source - eISSN | 1996-756X | source.identifier.eissn |
| Source - ISBN | 978-0-8194-9899-1 | source.identifier.isbn |
| Conference name | Conference on Gallium Nitride Materials and Devices IX | uulm.conferenceName |
| Conference place | San Francisco, CA | uulm.conferencePlace |
| Conference start date | 2014-02-03 | uulm.conferenceStartDate |
| Conference end date | 2014-02-06 | uulm.conferenceEndDate |
| Community | Fakultät für Ingenieurwissenschaften, Informatik und Psychologie | uulm.community |
| Community | Fakultät für Naturwissenschaften | uulm.community |
| WoS | 000336047500005 | uulm.identifier.wos |
| Bibliography | uulm | uulm.bibliographie |
