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Crystal quality improvement of semipolar (20-21) GaN on patterned sapphire substrates by in-situ deposited SiN mask

Erstveröffentlichung
2014
Authors
Meisch, Tobias
Alimoradi-Jazi, Maryam
Neuschl, Benjamin
Klein, Martin
Tischer, Ingo
et al.
Beitrag zu einer Konferenz


Published in
Gallium nitride materials and devices IX / Chyi, Jen-Inn (Hrsg.). - Bellingham, WA : Society of Photo-optical Instrumentation Engineers, 2014. - (Proceedings of SPIE ; 8986). - Art.-Nr. UNSP 89860A. - ISBN 978-0-8194-9899-1. - ISSN 0277-786X. - eISSN 1996-756X
Link to publication
https://dx.doi.org/10.1117/12.2037238
Faculties
Fakultät für Ingenieurwissenschaften, Informatik und Psychologie
Fakultät für Naturwissenschaften
Institutions
Institut für Optoelektronik
Institut für Quantenmaterie
Conference
Conference on Gallium Nitride Materials and Devices IX, 2014-02-03 - 2014-02-06, San Francisco, CA
Subject headings
[Free subject headings]: (20-21) | semipolar | GaN | PSS
[DDC subject group]: DDC 530 / Physics | DDC 620 / Engineering & allied operations

Metadata
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