Practical aspects of the use of the X-2 holder for HRTEM-quality TEM sample preparation by FIB

Erstveröffentlichung
2014
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Wissenschaftlicher Artikel


Authors
van Mierlo, Willem
Geiger, Dorin
Robins, Alan
Stumpf, Matthias
Ray, Mary Louise
et al.
Institutions
ZE Elektronenmikroskopie
Published in
Ultramicroscopy ; 147 (2014). - S. 149-155. - ISSN 0304-3991. - eISSN 1879-2723
Link to publication
https://dx.doi.org/10.1016/j.ultramic.2014.08.007
Keywords
FIB; TEM specimen preparation; Sample thickness; Backscattered electrons; EDX; Monte; Carlo simulations; Sub-kV argon milling; THICKNESS DETERMINATION; ELECTRON-MICROSCOPE; FILM-THICKNESS; SIMULATION; TARGET; KV
Dewey Decimal Group
DDC 570 / Life sciences
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