Practical aspects of the use of the X-2 holder for HRTEM-quality TEM sample preparation by FIB

Erstveröffentlichung

2014

Authors

van Mierlo, Willem

Geiger, Dorin

Robins, Alan

Stumpf, Matthias

Ray, Mary Louise

et al.

Wissenschaftlicher Artikel

Published in

Ultramicroscopy ; 147 (2014). - S. 149-155. - ISSN 0304-3991. - eISSN 1879-2723

Link to publication

https://dx.doi.org/10.1016/j.ultramic.2014.08.007

Institutions

ZE Elektronenmikroskopie

Subject headings

[Free subject headings]: FIB | TEM specimen preparation | Sample thickness | Backscattered electrons | EDX | Monte | Carlo simulations | Sub-kV argon milling | THICKNESS DETERMINATION | ELECTRON-MICROSCOPE | FILM-THICKNESS | SIMULATION | TARGET | KV
[DDC subject group]: DDC 570 / Life sciences

Metadata

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