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AuthorKaynak, Mehmetdc.contributor.author
AuthorValenta, Václavdc.contributor.author
AuthorSchumacher, Hermanndc.contributor.author
AuthorTillack, Bernddc.contributor.author
Date of accession2016-03-15T09:03:47Zdc.date.accessioned
Available in OPARU since2016-03-15T09:03:47Zdc.date.available
Year of creation2012dc.date.created
AbstractThe introduction of radio frequency micro-electro-mechanical systems (RFMEMS) as a monolithic option into state-of-the-art Si/SiGe BiCMOS foundry processes has paved the way for single chip radio frequency microsystems at millimeter wave frequencies. Deep silicon substrate etch techniques have also been developed to prevent high substrate losses which help in achieving high performance passive components at mm-wave frequencies. Using the same process techniques, realization of highly efficient on-chip antennas has become feasible, which in the millimeter-wave range no longer come with a hefty chip real estate penalty. In this paper, the current status of embedded BiCMOS+MEMS technology development is presented. Reconfigurable circuits using embedded RFMEMS switches and mm-wave transceivers with on-chip antennas are also discussed as application examples.dc.description.abstract
Languageendc.language.iso
PublisherUniversität Ulmdc.publisher
ID of original publ.http://dx.doi.org/10.1109/BCTM.2012.6352617dc.relation.uri
LicenseStandarddc.rights
Link to license texthttps://oparu.uni-ulm.de/xmlui/license_v3dc.rights.uri
Keywordmm-wave ICsdc.subject
KeywordOn-chip antennasdc.subject
KeywordReconfigurable ICsdc.subject
KeywordRFMEMS switchdc.subject
KeywordRFMEMSdc.subject
KeywordSilicon bipolar/BiCMOS process technologydc.subject
Dewey Decimal GroupDDC 620 / Engineering & allied operationsdc.subject.ddc
LCSHEmbedded computer systemsdc.subject.lcsh
TitleMEMS module integration into SiGe BiCMOS technology for embedded system applicationsdc.title
Resource typeBeitrag zu einer Konferenzdc.type
DOIhttp://dx.doi.org/10.18725/OPARU-2466dc.identifier.doi
PPN1652223002dc.identifier.ppn
URNhttp://nbn-resolving.de/urn:nbn:de:bsz:289-vts-84243dc.identifier.urn
GNDMEMSdc.subject.gnd
FacultyFakultät für Ingenieurwissenschaften und Informatikuulm.affiliationGeneral
Citation of original publ.Proceedings IEEE Bipolar/BiCMOS Circuits and Technology Meeting (BCTM 2012), Portland, OR, USA, Sept. 30 - Oct. 3, 2012uulm.citationOrigPub
Date of activation2013-03-25T16:57:56Zuulm.freischaltungVTS
Peer reviewjauulm.peerReview
DCMI TypeTextuulm.typeDCMI
VTS ID8424uulm.vtsID
CategoryPublikationenuulm.category
Conference nameIEEE Bipolar/BiCMOS Circuits and Technology Meeting (BCTM)uulm.conferenceName
Conference placePortland, ORuulm.conferencePlace
Conference start date2012-09-30uulm.conferenceStartDate
Conference end date2012-10-03uulm.conferenceEndDate
Bibliographyuulmuulm.bibliographie


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