Browsing Publikationen by Person "Balachandran, Srinath"
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High power nanocrystalline diamond RF MEMS - a combined look at mechanical and microwave properties KonferenzveröffentlichungIn this paper, thermally actuated nanocrystalline diamond bridges are presented. Intrinsic and boron doped NCD films have been grown on low resistive silicon wafer. Young’s modulus of 1020 GPa was measured using a ...