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AuthorSteinbach, Annina M.dc.contributor.author
AuthorKazemi, Samira B.dc.contributor.author
AuthorStrehle, Steffendc.contributor.author
Date of accession2019-04-09T12:27:07Zdc.date.accessioned
Available in OPARU since2019-04-09T12:27:07Zdc.date.available
Date of first publication2016dc.date.issued
Languageendc.language.iso
PublisherUniversität Ulmdc.publisher
Dewey Decimal GroupDDC 620 / Engineering & allied operationsdc.subject.ddc
TitleSolid-liquid-vapor etching of silicon nanostructures using hydrogen plasmadc.title
Resource typeBeitrag zu einer Konferenzdc.type
FacultyFakultät für Ingenieurwissenschaften, Informatik und Psychologieuulm.affiliationGeneral
InstitutionInstitut für Elektronische Bauelemente und Schaltungenuulm.affiliationSpecific
DCMI TypeTextuulm.typeDCMI
CategoryPublikationsnachweiseuulm.category
DOI (external)10.1002/pssa.201600374dc.identifier.doiExternal
Source - Title of sourcephysica status solidi (a)source.title
Source - PublisherWeinheimsource.publisherPlace
Source - Place of publicationWiley-VCH Verlagsource.publisher
Source - Volume213source.volume
Source - Issue11source.issue
Source - Year2016source.year
Source - From page2921source.fromPage
Source - To page2926source.toPage
Source - ISSN1862-6300source.identifier.issn
Source - eISSN1862-6319source.identifier.eissn
Conference nameSpring Conference of the European-Materials-Research-Society (E-MRS)uulm.conferenceName
Conference placeLille, Franceuulm.conferencePlace
Conference start date2016-05-02uulm.conferenceStartDate
Conference end date2016-05-06uulm.conferenceEndDate
Suitable communityFakultät für Ingenieurwissenschaften, Informatik und Psychologieuulm.community
WoS000388323200021uulm.identifier.wos
University Bibliographyjauulm.unibibliographie


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