Piezoresistivity of n-type conductive ultrananocrystalline diamond

Erstveröffentlichung

2016

Authors

Wiora, Neda

Mertens, Michael

Mohr, Markus

Bruehne, Kai

Fecht, Hans-Jörg

Wissenschaftlicher Artikel

Published in

Diamond and Related Materials ; 70 (2016). - S. 145-150. - ISSN 0925-9635. - eISSN 1879-0062

Link to publication

https://dx.doi.org/10.1016/j.diamond.2016.09.018

Faculties

Fakultät für Ingenieurwissenschaften, Informatik und Psychologie

Institutions

Institut für Mikro- und Nanomaterialien

Subject headings

[Free subject headings]: Ultrananocrystalline diamond | n-Type conductivity | Piezoresistivity | HFCVD | polycrystalline diamond | thin-films | pressure | sensors | silicon | crystalline
[DDC subject group]: DDC 530 / Physics | DDC 620 / Engineering & allied operations

Metadata

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