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AuthorKnittel, Peterdc.contributor.author
AuthorHibst, Nicolasdc.contributor.author
AuthorMizaikoff, Borisdc.contributor.author
AuthorStrehle, Steffendc.contributor.author
AuthorKranz, Christinedc.contributor.author
Date of accession2019-01-08T09:07:31Zdc.date.accessioned
Available in OPARU since2019-01-08T09:07:31Zdc.date.available
Date of first publication2017dc.date.issued
Languageendc.language.iso
PublisherUniversität Ulmdc.publisher
KeywordHigh-aspect ratio AFM probesdc.subject
KeywordSilicon nanowiresdc.subject
KeywordNanowire alignmentdc.subject
KeywordPt catalystdc.subject
KeywordFocused ion beam technologydc.subject
Keywordcarbon nanotube tipsdc.subject
Keywordhalide wave-guidesdc.subject
Keywordelastic propertiesdc.subject
Keywordgrating couplersdc.subject
Keywordafm probesdc.subject
Keywordnanofabricationdc.subject
Keyworddiffractiondc.subject
Keyworddepositiondc.subject
Keywordlasersdc.subject
Dewey Decimal GroupDDC 540 / Chemistry & allied sciencesdc.subject.ddc
Dewey Decimal GroupDDC 620 / Engineering & allied operationsdc.subject.ddc
TitleFocused ion beam-assisted fabrication of soft high-aspect ratio silicon nanowire atomic force microscopy probesdc.title
Resource typeWissenschaftlicher Artikeldc.type
FacultyFakultät für Ingenieurwissenschaften, Informatik und Psychologieuulm.affiliationGeneral
FacultyFakultät für Naturwissenschaftenuulm.affiliationGeneral
InstitutionInstitut für Analytische und Bioanalytische Chemieuulm.affiliationSpecific
InstitutionInstitut für Elektronische Bauelemente und Schaltungenuulm.affiliationSpecific
DCMI TypeTextuulm.typeDCMI
CategoryPublikationsnachweiseuulm.category
DOI (external)10.1016/j.ultramic.2017.03.031dc.identifier.doiExternal
Source - Title of sourceUltramicroscopysource.title
Source - Place of publicationElseviersource.publisher
Source - Volume179source.volume
Source - Year2017source.year
Source - From page24source.fromPage
Source - To page32source.toPage
Source - ISSN0304-3991source.identifier.issn
Source - eISSN1879-2723source.identifier.eissn
CommunityFakultät für Naturwissenschaftenuulm.community
CommunityFakultät für Ingenieurwissenschaften, Informatik und Psychologieuulm.community
WoS000403985600003uulm.identifier.wos
Bibliographyuulmuulm.bibliographie


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