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AuthorNeusser, Gregordc.contributor.author
Date of accession2018-12-17T15:25:16Zdc.date.accessioned
Available in OPARU since2018-12-17T15:25:16Zdc.date.available
Year of creation2018dc.date.created
Date of first publication2018-12-17dc.date.issued
AbstractFocused ion beam (FIB) and scanning electron microscopy (SEM) became indispensable tools for material science, nanotechnology and natural sciences, including various aspects of analytical chemistry. Maskless prototyping and 3D structuring with high accuracy as well as the advantage of serial sectioning and imaging of sample volumes, which provides structural information in three dimensions, leads to a wide-spread use of FIB/SEM systems. The thesis encompasses application and development of advanced focused ion beam methods combined with scanning electron microscopy towards solving analytical problems within the fields of chemistry, material science and cell biology. It is divided in two major parts: the acquisition and evaluation of FIB/SEM tomographic datasets and strategies for advanced FIB/SEM prototyping.dc.description.abstract
Languageendc.language.iso
PublisherUniversität Ulmdc.publisher
LicenseStandarddc.rights
Link to license texthttps://oparu.uni-ulm.de/xmlui/license_v3dc.rights.uri
KeywordFIB/SEM tomographydc.subject
Dewey Decimal GroupDDC 540 / Chemistry & allied sciencesdc.subject.ddc
LCSHFocused ion beamsdc.subject.lcsh
LCSHScanning electron microscopydc.subject.lcsh
MeSHElectron microscope tomography; Methodsdc.subject.mesh
TitleAdvanced focused ion beam methods for prototyping and analytical applicationsdc.title
Resource typeDissertationdc.type
Date of acceptance2018-11-13dcterms.dateAccepted
RefereeKranz, Christinedc.contributor.referee
RefereeWalther, Pauldc.contributor.referee
DOIhttp://dx.doi.org/10.18725/OPARU-10889dc.identifier.doi
PPN1046011081dc.identifier.ppn
URNhttp://nbn-resolving.de/urn:nbn:de:bsz:289-oparu-10946-6dc.identifier.urn
GNDElektronenmikroskopiedc.subject.gnd
GNDIonenstrahldc.subject.gnd
GNDPrototypingdc.subject.gnd
FacultyFakultät für Naturwissenschaftenuulm.affiliationGeneral
InstitutionInstitut für Analytische und Bioanalytische Chemieuulm.affiliationSpecific
InstitutionZE Elektronenmikroskopieuulm.affiliationSpecific
Grantor of degreeFakultät für Naturwissenschaftenuulm.thesisGrantor
DCMI TypeTextuulm.typeDCMI
CategoryPublikationenuulm.category
University Bibliographyjauulm.unibibliographie


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